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0.95%Fluorine(F2)_1.25%Krypton(Kr)_Neon(Ne)
1.25%Krypton(Kr)_Neon(Ne)
10% Methane_Argon (CH4_Ar)
5% Diborane(B2H6)_Nitrogen(N2)
5%Fluorine_Nitrogen (5%F2_N2)2
50 ppm B2H6_H2
Tetrafluoromethane-O2 (CF4-O2)
Specialty Pure Gases
Gas Mixtures
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