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Semiconductor Gas Mixtures
Plasma Etching Gases
Oxygen in Tetrafluoromethane
| 4% O2/CF4
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| 8% O2/CF4
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| 17.5% O2/CF4
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| Standard Valve Outlet CGA580
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| Other DISS CGA connections are avaliable upon
request.
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Phosphine in Argon
| 1.0% PH3/Ar
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| 2.0% PH3/Ar
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| 5.0% PH3/Ar
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| 10.0% PH3/Ar
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| 15.0% PH3/Ar
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| Standard Valve Outlet CGA350
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| Manual and pneumatic DISS CGA connections are
avaliable upon request.
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Phosphine in Helium
| 1.0% PH3/He
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| 2.0% PH3/He
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| 10.0% PH3/He
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| Standard Valve Outlet CGA350
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| Manual and pneumatic DISS CGA connections are
avaliable upon request.
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Phosphine in Hydrogen
| 1.0% PH3/H2
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| 5.0% PH3/H2
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| 10.0% PH3/H2
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| 15.0% PH3/H2
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| Standard Valve Outlet CGA350
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| Manual and pneumatic DISS CGA connections are
avaliable upon request.
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Phosphine in Nitrogen
| 1.0% PH3/N2
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| 2.0% PH3/N2
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| 3.0% PH3/N2
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| 4.0% PH3/N2
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| 5.0% PH3/N2
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| 10.0% PH3/N2
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| 15.0% PH3/N2
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| Standard Valve Outlet CGA350
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| Manual and pneumatic DISS CGA connections are
avaliable upon request.
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Silane in Argon
| 1.0% SiH4/Ar
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| 2.0% SiH4/Ar
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| 3.0% SiH4/Ar
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| 4.0% SiH4/Ar
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| 5.0% SiH4/Ar
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| 10.0% SiH4/Ar
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| Standard Valve Outlet CGA350
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| Manual and pneumatic DISS CGA connections are
avaliable upon request.
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Silane in Hydrogen
| 1.0% SiH4/H2
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| 2.0% SiH4/H2
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| 3.0% SiH4/H2
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| 4.0% SiH4/H2
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| 5.0% SiH4/H2
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| 10.0% SiH4/H2
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| Standard Valve Outlet CGA350
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| Manual and pneumatic DISS CGA connections are
avaliable upon request.
|
Silane in Nitrogen
| 1.0% SiH4/N2
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| 2.0% SiH4/N2
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| 3.0% SiH4/N2
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| 4.0% SiH4/H2
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| 5.0% SiH4/N2
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| 10.0% SiH4/N2
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| 20.0% SiH4/N2
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| Standard Valve Outlet CGA350
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| Manual and pneumatic DISS CGA connections are
avaliable upon request.
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