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Semiconductor Gas Mixtures

Plasma Etching Gases

Oxygen in Tetrafluoromethane

4% O2/CF4
8% O2/CF4
17.5% O2/CF4
Standard Valve Outlet CGA580
Other DISS CGA connections are avaliable upon request.

Phosphine in Argon

1.0% PH3/Ar
2.0% PH3/Ar
5.0% PH3/Ar
10.0% PH3/Ar
15.0% PH3/Ar
Standard Valve Outlet CGA350
Manual and pneumatic DISS CGA connections are avaliable upon request.

Phosphine in Helium

1.0% PH3/He
2.0% PH3/He
10.0% PH3/He
Standard Valve Outlet CGA350
Manual and pneumatic DISS CGA connections are avaliable upon request.

Phosphine in Hydrogen

1.0% PH3/H2
5.0% PH3/H2
10.0% PH3/H2
15.0% PH3/H2
Standard Valve Outlet CGA350
Manual and pneumatic DISS CGA connections are avaliable upon request.

Phosphine in Nitrogen

1.0% PH3/N2
2.0% PH3/N2
3.0% PH3/N2
4.0% PH3/N2
5.0% PH3/N2
10.0% PH3/N2
15.0% PH3/N2
Standard Valve Outlet CGA350
Manual and pneumatic DISS CGA connections are avaliable upon request.

Silane in Argon

1.0% SiH4/Ar
2.0% SiH4/Ar
3.0% SiH4/Ar
4.0% SiH4/Ar
5.0% SiH4/Ar
10.0% SiH4/Ar
Standard Valve Outlet CGA350
Manual and pneumatic DISS CGA connections are avaliable upon request.

Silane in Hydrogen

1.0% SiH4/H2
2.0% SiH4/H2
3.0% SiH4/H2
4.0% SiH4/H2
5.0% SiH4/H2
10.0% SiH4/H2
Standard Valve Outlet CGA350
Manual and pneumatic DISS CGA connections are avaliable upon request.

Silane in Nitrogen

1.0% SiH4/N2
2.0% SiH4/N2
3.0% SiH4/N2
4.0% SiH4/H2
5.0% SiH4/N2
10.0% SiH4/N2
20.0% SiH4/N2
Standard Valve Outlet CGA350
Manual and pneumatic DISS CGA connections are avaliable upon request.

Specialty Pure Gases

Gas Mixtures
Excimer Laser Gas Mixtures
Semiconductor Gas Mixtures
Medical Gas Mixtures
Lighting Gas Mixtures
Gas Mixtures for Carbon Dioxide Lasers
Argoon Fluoride Mixture
Argoon Neon Mixture
Krypton Fluoride Mixture
Krypton Neon Mixture
Phosphine Mixtures
Silane Mixtures
Gas Equitment
Tel:010-62960633
Fax:010-62960632
E-mail:info@hycegas.com
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