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电子气体混合气
Plasma
Etching Gases
Oxygen
in Tetrafluoromethane
| 4%
O2/CF4
|
| 8%
O2/CF4
|
| 17.5%
O2/CF4
|
| Standard
Valve Outlet CGA580
|
| Other
DISS CGA connections are avaliable upon request.
|
Phosphine
in Argon
| 1.0%
PH3/Ar
|
| 2.0%
PH3/Ar
|
| 5.0%
PH3/Ar
|
| 10.0%
PH3/Ar
|
| 15.0%
PH3/Ar
|
| Standard
Valve Outlet CGA350
|
| Manual
and pneumatic DISS CGA connections are avaliable
upon request.
|
Phosphine
in Helium
| 1.0%
PH3/He
|
| 2.0%
PH3/He
|
| 10.0%
PH3/He
|
| Standard
Valve Outlet CGA350
|
| Manual
and pneumatic DISS CGA connections are avaliable
upon request.
|
Phosphine
in Hydrogen
| 1.0%
PH3/H2
|
| 5.0%
PH3/H2
|
| 10.0%
PH3/H2
|
| 15.0%
PH3/H2
|
| Standard
Valve Outlet CGA350
|
| Manual
and pneumatic DISS CGA connections are avaliable
upon request.
|
Phosphine
in Nitrogen
| 1.0%
PH3/N2
|
| 2.0%
PH3/N2
|
| 3.0%
PH3/N2
|
| 4.0%
PH3/N2
|
| 5.0%
PH3/N2
|
| 10.0%
PH3/N2
|
| 15.0%
PH3/N2
|
| Standard
Valve Outlet CGA350
|
| Manual
and pneumatic DISS CGA connections are avaliable
upon request.
|
Silane
in Argon
| 1.0%
SiH4/Ar
|
| 2.0%
SiH4/Ar
|
| 3.0%
SiH4/Ar
|
| 4.0%
SiH4/Ar
|
| 5.0%
SiH4/Ar
|
| 10.0%
SiH4/Ar
|
| Standard
Valve Outlet CGA350
|
| Manual
and pneumatic DISS CGA connections are avaliable
upon request.
|
Silane
in Hydrogen
| 1.0%
SiH4/H2
|
| 2.0%
SiH4/H2
|
| 3.0%
SiH4/H2
|
| 4.0%
SiH4/H2
|
| 5.0%
SiH4/H2
|
| 10.0%
SiH4/H2
|
| Standard
Valve Outlet CGA350
|
| Manual
and pneumatic DISS CGA connections are avaliable
upon request.
|
Silane
in Nitrogen
| 1.0%
SiH4/N2
|
| 2.0%
SiH4/N2
|
| 3.0%
SiH4/N2
|
| 4.0%
SiH4/H2
|
| 5.0%
SiH4/N2
|
| 10.0%
SiH4/N2
|
| 20.0%
SiH4/N2
|
| Standard
Valve Outlet CGA350
|
| Manual
and pneumatic DISS CGA connections are avaliable
upon request.
|
产品规范
MSDS
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