Boron Trichloride
Boron Trichloride (BCl3) is a colorless,
toxic, nonflammable, corrosive liquid.
Applications
In semiconductor fabrication, boron trichloride is used
for p-type diffusion in silicon; ion implantation; plasma
etching of metals. Used in various chemical reactions.
Molecular Weight
117.17
Specific Gravity (Air=1)
4.03
Specific Volume
0.21m3/kg@21.1ºC, 101.325kPa
MSDS Reference
MSDS
Odor
Pungent, Irritating
CAS Registry No.
10294-34-5
Specs Sheet
Boron
Trichloride 5N
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