Dichlorosilane
Dichlorosilane (SiH2Cl2) is a
colorless, poisonous, highly toxic, corrosive, flammable,
liquified gas with a sharp, hydrochloric acid odor.
Applications
A silicon-precursor gas used in semiconductor fabrication
in epitaxial and chemical vapor deposition processes
to deposit layers of silicon or silicon compounds. Used
in the manufacturing of organo silicon compounds.
Molecular Weight
101.01
Specific Gravity (Air = 1)
3.52
Specific Volume
0.239m3/kg@21.1ºC, 101.325kPa
MSDS Reference
MSDS
Odor
Pungent, suffocating
CAS Registry No.
4109-96-0
Specs Sheet
Dichlorosilane
2.8N
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