Nitrogen Trifluoride
Nitrogen Trifluoride (NF3) is a colorless,
odorless, nonflammable, corrosive, toxic gas.
Applications
In semiconductor fabrication: plasma and thermal cleaning
of CVD reactors.
Molecular Weight
71.0
Specific Gravity (Air = 1)
2.46
Specific Volume
0.34m3/kg@21.1ºC, 101.325kPa
MSDS Reference
MSDS
Odor
Mold-like
CAS Registry No.
7783-54-2
Specs Sheet
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