Sulfur Hexafluoride
Sulfur Hexafluoride (SF6) is a colorless,
odorless, nonflammable, liquified gas.
Applications
Used as a dielectric in transformers; used as a blanketing
agent in metal fabrication.
In semiconductor fabrication: fluorine source for high
density plasma etching: offers high selectivity without
generating carbon by-products.
Molecular Weight
146.05
Specific Gravity (Air = 1)
5.11
Specific Volume
0.16m3/kg@21.1ºC, 101.325kPa
MSDS Reference
MSDS
Odor
Odorless
CAS Registry No.
2551-62-4
Specs Sheet
Sulfur
Hexafluoride 3N
Sulfur
Hexafluoride 4N
Sulfur
Hexafluoride 5N
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