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Boron Trifluoride

Boron Trifluoride, BF3, is a colorless, toxic, nonflammable, corrosive, high-pressure gas.

Applications
In semiconductor fabrication, boron trifluoride is used for p-type diffusion in silicon; ion implantation.

Molecular Weight
67.81

Specific Gravity (Air=1)
2.387

Specific Volume
0.35m3/kg@21.1ºC, 101.325kPa

MSDS Reference
MSDS

Odor
Pungent, Suffocating

CAS Registry No.
7637-07-2

Specs Sheet
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Specialty Pure Gases
Acetylene
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Boron Trichloride
Boron Trifluoride
1,3-Butadiene
n-Butane
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cis-2-Butene
trans-2-Butene
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Neopentane
n-pentane
Trans 2 Butene
Vinyl Acetylene

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