Boron Trifluoride
Boron Trifluoride, BF3, is a colorless,
toxic, nonflammable, corrosive, high-pressure gas.
Applications
In semiconductor fabrication, boron trifluoride
is used for p-type diffusion in silicon; ion implantation.
Molecular Weight
67.81
Specific Gravity (Air=1)
2.387
Specific Volume
0.35m3/kg@21.1ºC, 101.325kPa
MSDS Reference
MSDS
Odor
Pungent, Suffocating
CAS Registry No.
7637-07-2
Specs Sheet
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