Phosphine
Phosphine (PH3) is a colorless, highly toxic,
poisonous, flammable gas with a disagreeable garlic-like
odor.
Applications
Used in various chemical reactions.
In semiconductor fabrication: n-type dopant, for epitaxial
silicon, for doping selected regions of a silicon wafer;
for doping polycrystalline silicon for interconnects
or certain capacitors; for forming borophosphosilicate
glasses; and for ion implantation.
Molecular Weight
34.0
Specific Gravity (Air = 1)
1.184
Specific Volume
0.712m3/kg@21.1ºC, 101.325kPa
MSDS Reference
MSDS
Odor
Garlic-like
CAS Registry No.
7803-51-2
Specs Sheet
Phosphine
5N7
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