Hydrogen Chloride
Hydrogen Chloride (HCl) is a colorless, poisonous,
highly toxic, corrosive, nonflammable, acidic, liquified
gas with a pungent odor.
Applications
Component in calibration gas mixtures for environmental
monitoring systems; component in laser gas mixtures.
Used as a catalyst activator, and in various chemical
reactions.
In semiconductor fabrication: etching of native oxide
prior to epitaxial deposition; CVD reactor cleaning,
moisture getter in CVD oxides.
Molecular Weight
36.46
Specific Gravity (Air = 1)
1.268
Specific Volume
0.662m3/kg@21.1ºC, 101.325kPa
MSDS Reference
MSDS
Odor
Pungent
CAS Registry No.
7647-01-0
Specs Sheet
Hydrogen
chloride 4N
Hydrogen
chloride 5N
|