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Trichlorosilane

Trichlorosilane (SiHCl3) is a colorless, corrosive, flammable liquid with an irritating, choking odor.

Applications
Used in organo silicon chemical reactions.

In semiconductor fabrication: epitaxial deposition of silicon, especially for thicker (>5 microns) layers where an abrupt transition profile and tight process control for film thickness are not critical.

Molecular Weight
135.45

Specific Gravity (Air = 1)
4.7

Specific Volume
0.180m3/kg@21.1ºC, 101.325kPa

MSDS Reference
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Odor
Irritating, choking odor

CAS Registry No.
10025-78-2

Specs Sheet
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Specialty Pure Gases
Acetylene
Ammonia
Argon
Boron Trichloride
Boron Trifluoride
1,3-Butadiene
n-Butane
1-Butene
cis-2-Butene
trans-2-Butene
Carbon Dioxide
Carbon Monoxide
Chlorine
Dichlorosilane
Deuterium
Ethane
Ethylene
Halocarbon C318 (Octafluorocyclobutane)
Helium
Hexafluoropropylene
Hydrogen
Hydrogen Bromide
Hydrogen Chloride
Hydrogen Sulfide
Isobutane
Isobutylene
Krypton
Methane
Neon
Nitric Oxide
Nitrogen
Nitrogen Dioxide
Nitrogen Trifluoride
Nitrous Oxide
Oxygen
Phosphine
Propane
Propylene
Sulfur Dioxide
Sulfur Hexafluoride
Trichlorosilane
Xenon
1,2-Butadiene
2-Butene
Allene _1,2 Propadiene
Chloromethane
Cyclopropane
Dimethylether
Ethyl Acetylene
Hydrogen Selenide
Isopentane
Methyl Acetylen
Neopentane
n-pentane
Trans 2 Butene
Vinyl Acetylene

Gas Mixtures
Gas Equitment
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