Trichlorosilane
Trichlorosilane (SiHCl3) is a colorless,
corrosive, flammable liquid with an irritating, choking
odor.
Applications
Used in organo silicon chemical reactions.
In semiconductor fabrication: epitaxial deposition of
silicon, especially for thicker (>5 microns) layers
where an abrupt transition profile and tight process
control for film thickness are not critical.
Molecular Weight
135.45
Specific Gravity (Air = 1)
4.7
Specific Volume
0.180m3/kg@21.1ºC, 101.325kPa
MSDS Reference
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Odor
Irritating, choking odor
CAS Registry No.
10025-78-2
Specs Sheet
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